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Advances in Multiphysics Simulation and Experimental Testing of MEMS

Name: Advances in Multiphysics Simulation and Experimental Testing of MEMS
ISBN: 9780333542941

Narayan R Aluru

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This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.
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Catégories:

Engineering

Année:

2008

Editeur::

World Scientific Pub Co Inc

Langue:

english

Pages:

489

ISBN 10:

0333542940